Laser assisted texturing for thin and highly efficient silicon solar cells
Thorstensen, J.
,
Foss, S.E.
European Photovoltaic Solar Energy Conference and Exhibition, 26, Hamburg, 2011-09-05--09-11. EU PVSEC Proceedings, 26, 1628-1631
- Publ. year
- 2011
- Publ. type
- paper
- Abstract
- A method for creating surface textures based on <111> planes on monocrystalline silicon has been developed, using laser openings in a SiNx etch mask followed by a KOH etch. Both inverted pyramids and patch textures with good area coverage have been successfully demonstrated, with feature sizes of 15 – 50 μm, and an area coverage of 94 % and 76 % for patch structures and inverted pyramid structures respectively, as estimated by reflectance measurements and ray-tracing simulations.
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